Auto laser wafer marking system
| Auto laser wafer marking system |
The automated laser wafer marking system is designed for semiconductor processes, delivering high-efficiency and precision marking. It supports various formats, including Semi OCR, alphanumeric strings, barcodes, 2D codes, and graphics, enhancing traceability and identification. With built-in product ID reading and real-time verification after marking, it ensures accuracy and boosts production efficiency. View video-laser micromachining▶ Scroll Down for More Details▼ |
- Markets
Semiconductor manufacturing
- Applications
Wafer marking
- Materials
Si wafer
GaAs、GaN、II-VI: Lt(LiTaO₃)、Ln(LiNbO₃) wafer、Sapphire
■ Support 2”- 4” 、 4”- 6” 、6”-8”wafer marking
■ Choose the laser wavelength (IR or UV) based on the product characteristics for optimal pairing.
■ High quality, efficiency and output
■ Supports backside marking
■ Supports various formats, including Semi OCR, alphanumeric strings, barcodes, 2D codes, and graphics.
■ Supports SECS GEM standard
■ Equipped with a dust collection system and isolation area to reduce dust splashing and ensure easy maintenance.
■ Intuitive software interface with built-in marking preview and cassette anomaly detection.
■ Precise laser parameter settings combined with in-house optical technology to reduce the heat effects from the laser.
*The functions of the equipment in the series vary by model
Model specifications
| Items | Model | FCM 6104 | FCM 6114 | FCM 6004 | FCM 6024 |
|---|---|---|---|---|---|
Laser | Type | Optical fiber | Optical fiber | DPSS | DPSS |
| Wavelength | IR | IR | UV | UV | |
| Wafer materials | Si/Sapphire Compound wafer | ● | ● | ● | ● |
| Wafer size | 2"-4",4"-6" | ● | ● | ● | ● |
| 6"-8" | ● | ||||
| Wafer alignment | Flat/Notch | ● | ● | ● | ● |
| OCR | Before marking | ● | |||
| After marking | ● | ● | ● | ||
| Backside marking | ● | ||||
| wafer thickness | 250μm≤T<700μm | ||||
| Repeatability | ±200μm | ±200μm | ±200μm | ±100μm | |
Actual marking results
Provides multiple marking forms, including Semi OCR, Semi Double, texts, numbers, barcode and 2D codes (Data Matrix/QR code), Graphics and curve arrangement
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Know more about laser micromachining solutions
Why FitTech?
FitTech focus on design and manufacturing photoelectric related system. We provide accurate and exquisite processing quality with leading R&D capability.
With well experienced and our completed and elite R&D team, customized such as automated, integrated with robot, system integration, etc. are all available.
FitTech's Laser cutting/drilling Machine that design and manufactured in Taiwan. And we also provide instance after service by our elite technical team.
Model specifications Comparison
| Items | Model | FCM 6104 | FCM 6114 | FCM 6004 | FCM 6024 |
|---|---|---|---|---|---|
Laser | Type | Optical fiber | Optical fiber | DPSS | DPSS |
| Wavelength | IR | IR | UV | UV | |
| Wafer materials | Si/Sapphire Compound wafer | ● | ● | ● | ● |
| Wafer size | 2"-4",4"-6" | ● | ● | ● | ● |
| 6"-8" | ● | ||||
| Wafer alignment | Flat/Notch | ● | ● | ● | ● |
| OCR | Before marking | ● | |||
| After marking | ● | ● | ● | ||
| Backside marking | ● | ||||
| wafer thickness | 250μm≤T<700μm | ||||
| Repeatability | ±200μm | ±200μm | ±200μm | ±100μm | |