FCM 6000 Series

Auto laser wafer marking system

Auto laser wafer marking system

The automated laser wafer marking system is designed for semiconductor processes, delivering high-efficiency and precision marking. It supports various formats, including Semi OCR, alphanumeric strings, barcodes, 2D codes, and graphics, enhancing traceability and identification. With built-in product ID reading and real-time verification after marking, it ensures accuracy and boosts production efficiency. 

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  • Markets

    Semiconductor manufacturing

  • Applications

    Wafer marking

  • Materials

    Si wafer
    GaAs、GaN、II-VI: Lt(LiTaO₃)、Ln(LiNbO₃) wafer、Sapphire

     

 


 

■ Support 2”- 4” 、 4”- 6” 、6”-8”wafer marking

■ Choose the laser wavelength (IR or UV) based on the product characteristics for optimal pairing.

■ High quality, efficiency and output

■ Supports backside marking

■ Supports various formats, including Semi OCR, alphanumeric strings, barcodes, 2D codes, and graphics.

■ Supports SECS GEM standard

■ Equipped with a dust collection system and isolation area to reduce dust splashing and ensure easy maintenance.

■ Intuitive software interface with built-in marking preview and cassette anomaly detection.

■ Precise laser parameter settings combined with in-house optical technology to reduce the heat effects from the laser.

 

*The functions of the equipment in the series vary by model

 

 

Model specifications

 

ItemsModelFCM 6104FCM 6114FCM 6004FCM 6024

Laser

TypeOptical fiber Optical fiberDPSSDPSS
WavelengthIRIRUVUV
Wafer materialsSi/Sapphire
Compound wafer
Wafer size2"-4",4"-6"
6"-8"   
Wafer alignmentFlat/Notch
OCR Before marking   
After marking  ● 
Backside marking   
wafer thickness250μm≤T<700μm
Repeatability±200μm   ±200μm  ±200μm   ±100μm

 

 

Actual marking results

Provides multiple marking forms, including Semi OCR, Semi Double, texts, numbers, barcode and 2D codes (Data Matrix/QR code), Graphics and curve arrangement

 

 

 

 

 

 

 

 

 

 

 

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Why FitTech?

 


FitTech focus on design and manufacturing photoelectric related system. We provide accurate and exquisite processing quality with leading R&D capability.

With well experienced and our completed and elite R&D team, customized such as automated, integrated with robot, system integration, etc. are all available.

FitTech's Laser cutting/drilling Machine that design and manufactured in Taiwan. And we also provide instance after service by our elite technical team.

 

 

 


Model specifications Comparison

 

ItemsModelFCM 6104FCM 6114FCM 6004FCM 6024

Laser

TypeOptical fiber Optical fiberDPSSDPSS
WavelengthIRIRUVUV
Wafer materialsSi/Sapphire
Compound wafer
Wafer size2"-4",4"-6"
6"-8"   
Wafer alignmentFlat/Notch
OCR Before marking   
After marking  ● 
Backside marking   
wafer thickness250μm≤T<700μm
Repeatability±200μm   ±200μm  ±200μm   ±100μm